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UPTON, N.Y., Nov. 1, 2021 A process for making hybrid organic-inorganic materials (photoresists) sensitive to extreme-ultraviolet (EUV) light is one of

Yifan fangPriscilla antunezChang yong namPoorni upadhyaNikhil tiwalePoornima upadhyaBrookhaven labLawrence livermore national laboratoryTechnology commercialization fundNational labs accelerator pitch eventUs department of energyOffice of technology transitionsUc davis institute for innovationNational synchrotron light sourceOffice of science user facility at brookhavenNational security department