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Refining GaN substrate thinning

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Yasuhisa Sano , Osaka University ,

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Taisuke Miyoshi , Akiyo Oshima , Masataka Owada , Yasuhisa Sano , Yoshihiko Hamabe , Kosei Takeyama , Sachiko Ito , Tokyo Tech Student Support Center , Corporate Audit Office , Renewable Energy Solutions Division , Fujifilm Corporation , Department Of Mechanical Sciences , Nippon Light Metal Co Ltd , Mitsubishi Corporation , Japan Ltd , Department Of Nuclear Engineering , Hitotsubashi University , Department Of Mechanical Engineering , Department Of Architecture , Department Of Mechano , Seiko Instruments Inc , Department Of Control Engineering , Hitachi Ltd , Iharanikkei Chemical Industry Co Ltd , School Of Science , Planetary Sciences ,