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EV GROUP ACHIEVES DIE-TO-WAFER FUSION AND HYBRID BONDING MILESTONE WITH 100-PERCENT DIE TRANSFER YIELD ON MULTI-DIE 3D SYSTEM-ON-A-CHIP

Successful full-system die-to-wafer transfer at EVG's Heterogeneous Integration Competence Center demonstrates important step forward in achieving process maturity ST. FLORIAN, Austria, July 27, 2022 /PRNewswire/ EV Group (EVG), a leading provider of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, today announced it has achieved a major breakthrough in die-to-wafer (D2W) fusion and hybrid bonding by successfully demonstrating 100-percent void-free bonding yield of multiple die of different sizes from a complete 3D system-on-a-chip (SoC) in a single transfer process using EVG's GEMINIFB automated hybrid bonding system. Such an accomplishment had been a key challenge for D2W bonding until today, as well as a major hurdle to scaling down the cost of implementing heterogeneous integration. This important industry achievement was carried out at EVG's Heterogeneous Integration Competence Center (HICC), which is designed to assist ....

Clemens Schtte , Thomas Uhrmann , David Moreno , Markus Wimplinger , Source Ev Group , Prnewswire Ev Group , Heterogeneous Integration Competence Center , Sky Communications , Ev Group , Integration Competence Center , Successful Full System Die To Wafer Transfer At Evg 39s Heterogeneous Integration Competence Center Demonstrates Important Step Forward In Achieving Process Maturity St Florian , July 27 , 022 Prnewswire Ev Group Evg , A Leading Provider Of Wafer Bonding And Lithography Equipment For The Mems , Anotechnology And Semiconductor Markets , Oday Announced It Has Achieveda Major Breakthrough In Die To Wafer D2w Fusion And Hybrid Bonding By Successfully Demonstrating 100 Percent Void Free Yield Of Multiple Different Sizes Froma Complete 3d System Ona Chip Soc Ina Single Transfer Process Using Evg 39s Geminifb Automated Such An Accomplishment Had Beena Key Challenge For Until Today , S Well Asa Major Hurdle To Scaling Down The Cost Of Implementing Heterogeneous Integration This Important Industry Achievement Was Carried Out At Evg 39s Competence Center Hicc , Hich Is Designed To Assist Customers In Leveraging Evg 39s Process Solutions And Expertise Accelerate The Development Of New Differentiating Products Applications Driven By Advances System Integration Packaging Leading Edge Such As Artificial Intelligence Ai , Autonomous Driving , Ugmented Virtual Reality And 5g All Require The Development Of High Bandwidth , Igh Performance And Low Power Consumption Devices Without Increasing Production Cost Asa Result , He Semiconductor Industry Is Turning To Heterogeneous Integration The Manufacturing , Ssembly And Packaging Of Multiple Different Components Or Dies With Feature Sizes Materials Ontoa Single Device Package In Order To Increase Performance On New Generations D2w Hybrid Bonding Isa Key Manufacturing Technology For Heterogeneous Integration Yet , S The Ever Higher Bandwidth Needs Of These Devices Drive Newer Packaging Technologies , Ew Developments In D2w Hybrid Bonding And Metrology Are Also Needed Quot Requires Substantially Different Manufacturing Technologies To Standard Packaging Processes , Ringing It Much Closer To Front End Manufacturing Especially In Terms Of Cleanliness ,

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