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In a paper published in the International Journal of Extreme Manufacturing, it was demonstrated that GHz burst mode femtosecond laser pulses could be used to create unique two-dimensional (2D) laser-induced periodic surface structures on silicon.

Shi baiKotaro obataKoji sugiokaGodai miyajiSemiconductors industryFindings of the researchInternational journal of extreme manufacturingInternational journalExtreme manufacturingSurface nanostructures created with femtosecondShota kawabataIndustry focusBurst mode femtosecond lasers