EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, today introduced the EVG®880 LayerRelease™ system, a dedicated high-volume manufacturing (HVM) equipment platform incorporating EVG's innovative infrared (IR) LayerRelease™ technology. Providing a two-fold increase in throughput compared to the previous-generation platform, the EVG880 LayerRelease system enables nanometer-precision release of bonded, deposited or
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