The NanoSpace UHV FIB-SEM from TESCAN is a versatile, easy-to-use system specifically designed to function under ultra-high vacuum (UHV) conditions.
Users can configure the NanoSpace system either as a scanning electron microscope (SEM) or as a dual-beam platform that incorporates an SEM and a high performance focused ion beam (FIB).
Featuring a modular design, the UHV system allows an array of SEM and FIB columns that match the specific goals and needs of end-users. The system also offers a comprehensive, optimal and customized solution for surface analysis and for FIB nano-machining on samples that need the most rigorous contamination-free environment.
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