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Based on earlier outstanding reviews of defect inspection methods, researchers conducted a thorough analysis of fresh perspectives and thrilling trends.

Shiyuan liuJiamin liuTianlai xuJinlong zhuHuazhong university of scienceOptical metrology research centerHarbin institute of technologyInternational journal of extreme manufacturingStudy coChinese university of hong kongHuazhong universityHarbin instituteChinese universityHong kongDefect inspection methodsCoherent fourier