This study discusses atom probe tomography (APT) and the feasibility of using a novel script-controlled focused ion beam-scanning electron microscopy (FIB-SEM) system for tip fabrication to improve the reliability and reproducibility of the APT technique.
Researchers demonstrated the feasibility of using deep learning to simulate the post-fabrication appearance of nano/microstructures fabricated by focused ion beam milling in the 2D projection of a scanning electron microscope image.