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Since the advent of femtosecond laser in the early 1990s, ultrafast laser processing has been considered a promising nanofabrication approach, which is unique i

Hongbo sunNational natural science foundation of chinaTsinghua universityKey laboratory of precision measurement technologyDepartment of precision instrumentLight scienceProfessor hongbo sunState key laboratoryPrecision measurement technologyPrecision instrumentNational natural science foundationAser manufacturing spatial resolution quantum limitAll journal newsMaterials scienceQuantum mechanicsChinese academy of sciences