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IMAGE: New abatement device developed in this study.
In the abatement device developed in this study, Low explosion limit of flammable gas in the piping is raised by reducing the. view more
Credit: Kanken Techno Co.,Ltd
Manufacturing process for industries of electronics, such as semiconductors, flat panel displays, and solar batteries uses dangerous toxic and flammable gases, such as silane gas and hydrogen gas. Currently, to detoxify these dangerous gases, a thermal oxidation reaction, in which they are heated to 1000? or more and decomposed is mainly used. For example, as silane gas, which is often used in the chemical vapor disposition (CVD) (1) process for semiconductors, causes an explosive reaction when it comes into contact with the air, after diluting the concentration with large amounts of nitrogen gas so that the concentration is below the lower explosion limit (2), it can be heat-treated and detoxified. Previously, the development of reacting fu