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The foundations of the digital world are built on the performances of semiconductor-integrated chips. Semiconductor lithography is the process by which the functional structures within the integrated circuits are patterned.

New yorkUnited statesPanagiotis argitisJingyuan dengErsan uzunoglu shutterstockHaoxing renIlamaran sivarajahaprChaoyu yangFlorian kaferChristopherk oberSemiconductor lithographyAssociation for computing machinerySemiconductor lithography systemsIndustry focusSouth pacific design automation conferenceComputing machinery