LEUVEN (Belgium), MAY 23, 2023 This week, at the 2023 IEEE International Interconnect Technology Conference (2023 IEEE IITC), imec, a world-leading research and innovation hub in nanoelectronics and digital technologies, provides the first experimental evidence that the resistivity of a thin conductor film on a 300mm Si wafer can be lower than that of Cu…
Nanosecond pulsed laser annealing is a controlled and selective heat treatment process to achieve desired material properties. Here, we take a look at nanosecond pulsed laser annealing, its advantages over other annealing techniques, and recent research findings.
LEUVEN (Belgium), June 30, 2022 This week, at the 2022 IEEE International Interconnect Technology Conference (IITC 2022), imec, a world-leading research and innovation hub in nanoelectronics and digital technologies, presents options to reduce the metal line resistance at tight metal pitches, mitigating the resistance/capacitance (RC) increase of future interconnects using direct metal patterning. For the…
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