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Metasurface-based miniaturized spectroscopic ellipsometer
Spectroscopic ellipsometry has been widely adopted for the measurement of thin film thickness as well as its optical constant. However, conventional ellipsomete
Yuanmu yang
Guoqiang institute
National natural science foundation of china
Tsinghua university
Light science
Professor yuanmu yang
National natural science foundation
Etasurface array
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Chinese academy of sciences
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