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This article from Avantes discusses how plasma systems can be monitored using optical emission spectroscopy across a wide range of applications.

Avantes bvmarEmily mageeJournal of vacuum science technologyCoatings technologyPlasma vacuum chamberImage creditOptical spectroscopy systemsApplied plasmaPlasma processesVacuum sciencePlasma etchingPlasma etching processesAvantes availablePlasma aerodynamicsCurrent statusAerospacelab journal issue