The Reliable 3D Characterization of Pressure Sensors

This article describes the MEMS pressure sensors and their 3D characterization.

Related Keywords

Mikrosensorik Gmb ,Maria Osipova ,Flexible Electronics ,Cis Forschungsinstitut ,Pressure Sensor Dynamics ,Image Credit ,Layer Thickness ,Interconnect Access ,3d ,Pressure Sensors ,Pressure ,Ensosrs ,