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Semiconductor-related stocks led the decline after U.S. tech shares slumped last week, with the Philadelphia semiconductor shares index hitting a one-month low.
Taiyo Yuden lost 3.63%, while Sumco fell 4.1%. Tokyo Electron was down 2.09%, while Advantest shed 1.4%.
The broader Topix lost 1.3%, with all of its 33 industry sub-indexes except the drug sector in the red, in line with shares slipping globally on rising concerns about a surge in coronavirus cases.
Tokyo Olympics organizers on Sunday reported the first COVID-19 cases among competitors residing in the athletes’ village, as its population swells ahead of the start of the pandemic-hit Games next week.