Improved Nanolithography Patterning by Combining Laser Scanning and Spectroscopy

This article explores the combination of enhanced nanolithography patterning via the combination of laser scanning and spectroscopy.

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Erik Runge ,Aimee Molineux ,University Of New Mexico Albuquerque ,Minusk Technology ,Busani Research Group ,Engineering At Minusk Technology ,Schematic Of The Minusk Technology ,Jim Mcmahon At Zebra Communications ,Minusk Technologyaug ,Laser Scanning Plus ,New Mexico ,Busani Research ,Image Credit ,Vice President ,Jim Mcmahon ,Nanolithography Patterning ,Laser Scanning ,Pectroscopy ,Anolithography ,